UPDATED. 2021-04-13 20:54 (화)
ACM adds more processes to its 300mm Ultra Fn furnace
ACM adds more processes to its 300mm Ultra Fn furnace
  • Nari Lee
  • 승인 2021.04.08 18:06
  • 댓글 0
이 기사를 공유합니다

Equipment supports processes used for logic, memory and power
Image: ACM Research
Image: ACM Research

ACM Research on Wednesday announced in South Korea that its 300mm Ultra Fn furnace dry processing equipment will support additional semiconductor manufacturing processes.

The additions are: un-doped poly deposition, doped poly deposition, gate oxide deposition, high-temperature oxidation and high-temperature annealing. They are supported by ACM Research’s own algorithm for stable temperature control. 

The new processes can be added in the company’s previous oxide silicon nitride (SiN) systems by swapping certain modules and changes in some of the layouts. This will save customers cost, ACM Research said.

“Our strategy has consistently been to identify markets and applications with high growth potential within the semiconductor manufacturing industry and develop leading-edge technology in collaboration with our customers to address them,” ACM Research CEO David Wang said.

“We are now able to perform more than 80% of batch thermal processes, including LPCVD processes for SiN, HTO, un-doped poly and doped poly deposition, gate oxide deposition process, ultra-high temperature oxidizing and annealing processes up to 1200 Celcius. The rapid adoption of this new product line further validates our collaborative strategy.”

The company’s first SiN LPCVD was validated by a logic customer last year. Another furnace for alloy annealing, customized with micro-Torr level vacuum functionality, was supplied to a power device making customer in 2020 as well, the company said.

The new furnace processes are being tested at customer’s production sites, ACM Research added.


댓글삭제
삭제한 댓글은 다시 복구할 수 없습니다.
그래도 삭제하시겠습니까?
댓글 0
댓글쓰기
계정을 선택하시면 로그인·계정인증을 통해
댓글을 남기실 수 있습니다.

  • 515, Nonhyeon-ro, Gangnam-gu, Seoul, Republic of Korea 4F, Ahsung Bldg.
  • 대표전화 : 82-2-2658-4707
  • 팩스 : 82-2-2659-4707
  • 청소년보호책임자 : Stan LEE
  • 법인명 : The Elec Inc.
  • 제호 : THE ELEC, Korea Electronics Industry Media
  • 등록번호 : 서울, 아05435
  • 등록일 : 2018-10-15
  • 발행일 : 2018-10-15
  • 발행인 : JY HAN
  • 편집인 : JY HAN
  • THE ELEC, Korea Electronics Industry Media Prohibiting unauthorized duplication,publishing,modification and distribution the material on this Site for any purpose.
  • Copyright © 2021 THE ELEC, Korea Electronics Industry Media. All rights reserved. mail to powerusr@thelec.kr
ND소프트