UPDATED. 2021-10-20 18:41 (수)
Auros to start thin film measurement kit development in Q4
Auros to start thin film measurement kit development in Q4
  • Jang Keyoung Yoon
  • 승인 2021.09.17 13:39
  • 댓글 0
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At new factory in Dongtan
WBIS-200 Image: Auros Technology
WBIS-200 Image: Auros Technology

Fab equipment maker Auros Technology will start the development of its new thin film measurement equipment in the fourth quarter.

It will start the development when it enters its new factory currently being built at Dongtan at Hwaseong city.

The new factory will house a large clean room where the company will conduct research and development for the new material.

The equipment is used to measure whether the thickness of thin films deposited on wafers is uniform.

Auros’ kits kit will be able to measure in the 0.1 nanometer range.

The company is developing the new kit to reduce its reliance on overlay equipment, its current main product.

It is also developing inspections kits that can be used in wafer fabrication.

Thin film measurement equipment can be used in various steps of fabrication, from etching, deposition to flattening processes.

This means the business can be more lucrative than overlay equipment.

An Auros spokesperson said it plans to finish the development of the new kits by the end of 2022.

The company has also supplied its latest inspection kit, WBIS-200, to SK Hynix’s fab at Cheongju.

It will likely supply the kits to the memory giant’s fab at Wuxi, China for 8-inch foundry next year.

Auros is also planning to launch its 12-inch PKG Warpage inspection kit this year.

The kit is used to check how much the wafer warped during fabrication.


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