SK Siltron has developed a recycling technology in which 95% of the wasted slurry in semiconductor wafer production can be reused, the company said on Tuesday.
The technology was co-developed with Korea University of Technology and Education and Cleansolution.
Slurry used to flattened the unnecessary membranes formed on the wafer’s surface.
It is mainly used in wire-sawing processes.
Up to now, these slurry were unable to be reused after the process is completed. They were burned or buried afterwards which raised environmental concerns.
SK’s technology can divide the wasted slurry into sludge and oil. The sludge is further divided to solid powder and distilled oil, which can be reused.
SK, the university and Cleansolution has applied as co-creators in their patent filings.
The company is planning to commercialize the technology with Cleansolution and KST. Cleansolution will get the distilled oil and powder, and provide them to KST. KST will reprocess them again to commercialize them.