LINTEC KOREA intends to announce the VU-900 series Vaporizer products in Semicon Korea 2019, the flagship product.
The abbreviation "rizer" means "vaporizer". It is used for direct vaporization of the liquid precursor to gas in a semiconductor diffusion process and supplies the vacuum chamber of chemical vapor deposition (CVD) equipment. This can produce a dielectric film.
DRAM distinguishes between 0 and 1 depending on whether a cell capacitor charge is stored or not. When making a capacitor, it forms a dielectric film to prevent the charge from leaking too quickly or to eliminate interference with the surrounding capacitors. The dielectric film serves as an insulating film, such as an electric wire plastic sheath. The narrower the DRAM line width, the better the quality of the dielectric film is required.
Maintaining the uniformity of the dielectric film is the core of DRAM manufacturing. When fabricating 20 nm capacitors under the same conditions, with a molecular structure it is very difficult to make a uniform dielectric film in a smaller transistor. The key to success is how thin and dense the dielectric layer can be made as microfabrication continues.
Equipment manufacturers are demanding shorter response times, uniform application of thin films, and increased vaporization when vaporizing precursors. Lintec's VU-900 series of vaporizers are specifically tailored to these customer needs. It has already been used in the mass production of zirconium (Zr) dielectric films.
"The VU-900 has been evaluated as a product optimized for uniform dielectric film formation because it has the lowest thermal distortion and mist of vaporized gas," said Sung-Gil Jun, CEO of LINTEC Korea. "We have also reduced maintenance costs for our customers," he explained.
LINTEC Korea also exhibits a mass flow controller (MFC) and a heat exchanger, in addition to the vaporizer. MFC accurately measures and controls the flow rate under conditions where the temperature or pressure changes based on the mass of the invariant. The heat exchanger is a device that converts the process gas used in the semiconductor process into instantaneous high temperature.