ASML said on Wednesday that it has recorded 4.36 billion euros in net sales and 1.33 billion in net income in the first quarter of 2021.
This is a rise of 83.3% and 225%, respectively, from a year ago.
The Netherlands-based company sold seven units of extreme ultraviolet (EUV) system in the first quarter. It expects to ship around 40 units this year.
An EUV system is thought to cost around 200 billion won per unit.
In the first quarter, South Korea accounted for 44% of its shipment, while Taiwan took up 43%.
ASML supplies its chip-making equipment to Samsung, SK Hynix, TSMC and other global chip makers.
"Compared to three months ago, we are seeing a significant increase in demand across all market segments and our product portfolio. The build-up of the digital infrastructure with secular growth drivers such as 5G, AI and high-performance computing solutions fuels demand for advanced and mature nodes in logic as well as memory. We now expect revenue growth towards 30% in 2021 compared to last year," said ASML President and CEO Peter Wennink.