UPDATED. 2022-06-30 18:13 (목)
Eugenetec developing TiN-ALD equipment for 10nm DRAM
Eugenetec developing TiN-ALD equipment for 10nm DRAM
  • Jang Keyoung Yoon
  • 승인 2022.03.21 16:49
  • 댓글 0
이 기사를 공유합니다

Equipment used to deposit reliable films in capacitors
Image: Eugenetec
Image: Eugenetec

Eugenetec is currently developing a titanium nitride atomic layer deposition (TiN-ALD) equipment for application in 10-nanometer (nm) DRAM production, TheElec has learned.

The equipment is used to form the electrode films of the capacitors in DRAM.

Eugenetec began development for the new equipment late last year, sources said.

TiN is highly conductive and is used as the material for metal barriers in chips that prevent capacitors, oxide films and other materials mixing.

Each cell in DRAM is comprised of a transistor and capacitor. Capacitors are comprised of insulator films and electrode films.

These films are required to be deposited more thinly and uniformly as DRAM sizes continue to shrink.

ALD equipment deposits these film layers at atomic-levels to achieve this. The equipment is replacing chemical vapor deposition and physical vapor deposition equipment in advanced process nodes.

Eugenetec’s compatriots Jusung Engineering and Wonik IPS are already supplying ALD equipment to South Korean memory makers.

Eugenetec also succeeded in supplying its first ALD equipment to Samsung’s DRAM fab last year. The equipment deposits silicon nitride.


댓글삭제
삭제한 댓글은 다시 복구할 수 없습니다.
그래도 삭제하시겠습니까?
댓글 0
댓글쓰기
계정을 선택하시면 로그인·계정인증을 통해
댓글을 남기실 수 있습니다.

  • 515, Nonhyeon-ro, Gangnam-gu, Seoul, Republic of Korea 4F, Ahsung Bldg.
  • 대표전화 : 82-2-2658-4707
  • 팩스 : 82-2-2659-4707
  • 청소년보호책임자 : Stan LEE
  • 법인명 : The Elec Inc.
  • 제호 : THE ELEC, Korea Electronics Industry Media
  • 등록번호 : 서울, 아05435
  • 등록일 : 2018-10-15
  • 발행일 : 2018-10-15
  • 발행인 : JY HAN
  • 편집인 : JY HAN
  • THE ELEC, Korea Electronics Industry Media Prohibiting unauthorized duplication,publishing,modification and distribution the material on this Site for any purpose.
  • Copyright © 2022 THE ELEC, Korea Electronics Industry Media. All rights reserved. mail to powerusr@thelec.kr
ND소프트