UPDATED. 2024-07-12 07:53 (금)
DIT supplying SK Hynix with laser annealing equipment 
DIT supplying SK Hynix with laser annealing equipment 
  • Noh Tae Min 기자
  • 승인 2023.08.10 09:45
  • 댓글 0
이 기사를 공유합니다

Equipment maker also in talks with LG Energy
Image: DIT
Image: DIT

Fab equipment maker DIT has begun supplying laser annealing equipment to chip giant SK Hynix, TheElec has learned.

Annealing equipment is used to repair wafers that are damaged after ion injection.

During the ion injection process, Group 3 or Group 5 dopants such as B, I or As are injected into the wafer to run electric currents on it. These dopants are bonded with the silicon, but sometimes they are not bonded and annealing is used to fix this.

In annealing, heat is used to bond the dopant with the silicon. Previously, a furnace was used for this but today tungsten halogen lamps are used for fast annealing. However, when using this fast annealing technique, the temperature between the center and edges of the wafer may vary, causing the wafer to warp.

Laser annealing was introduced to solve this problem. Laser is used only on the part of the wafer that is defective to avoid warpage. 

Both South Korean chip makers are adopting laser annealing in their chip production; SK Hynix is collaborating with DIT while Samsung is working with EO Technics.

DIT’s equipment went through a long quality test by SK Hynix before it passed, sources said.

DIT will be providing a small number of units of the laser annealing equipment and began massive supply next year. They will be used in the production of latest DRAMs by SK Hynix, they added.

DIT recorded 24.1 billion won in revenue and 1.5 billion won in operating loss in the first quarter. Out of its revenue, 93.7% came from automated optical inspection equipment, while laser equipment only accounted for 2.7% of the total. But the supply deal with SK Hynix is expected to change this.

Meanwhile, DIT is also going through a quality test by LG Energy Solution for its battery inspection equipment.

DIT declined to comment on the matter.

삭제한 댓글은 다시 복구할 수 없습니다.
그래도 삭제하시겠습니까?
댓글 0
계정을 선택하시면 로그인·계정인증을 통해
댓글을 남기실 수 있습니다.

  • 515, Nonhyeon-ro, Gangnam-gu, Seoul, Republic of Korea 4F, Ahsung Bldg.
  • 대표전화 : 82-2-2658-4707
  • 팩스 : 82-2-2659-4707
  • 청소년보호책임자 : Stan LEE
  • 법인명 : The Elec Inc.
  • 제호 : THE ELEC, Korea Electronics Industry Media
  • 등록번호 : 서울, 아05435
  • 등록일 : 2018-10-15
  • 발행일 : 2018-10-15
  • 발행인 : JY HAN
  • 편집인 : JY HAN
  • THE ELEC, Korea Electronics Industry Media Prohibiting unauthorized duplication,publishing,modification and distribution the material on this Site for any purpose.
  • Copyright © 2024 THE ELEC, Korea Electronics Industry Media. All rights reserved. mail to powerusr@thelec.kr